Crystal boat transfer machine

Crystal boat transfer machine

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The 4-inch wafer boat converter is used for automatic transfer of wafers on a high temperature diffusion furnace, and the wafers on the quartz wafer boat are transferred to the general carrier boat, and the wafers can also be transferred from the general carrier boat to the quartz wafer boat.

LI17

■ When the quartz boat containing wafers is placed in the boat seat, align the wafers with the wafers. The wafer positioning seat is placed in order to avoid dislocation of the wafer.

■ In single action mode, it is recommended to operate one axis at a time to avoid unexpected accidents

 

■ External Dimensions Weight:

  • W: 1600 x D800 x H1650mm 

■ heavy   quantity:

  • Weight about 90kg